Electrochemical fine machining method based on ionic conductance and its device



The present invention discloses an ionic conductance based electrochemical microfine machining method and its equipment. It is characterized by that said invention uses an electrolytic cell in which a machining electrode formed from the metal electrode placed in capillary tube filled up with electrolyte is used as anode and a sample to be machined is used as cathode, and when the machining electrode is used to transversely scan the surface of machined sample, on basis of change of ionic conductance between machining electrode and machined sample a feedback system is used to control the space between them, and when a d.c. voltage is applied between the machining electrode and machined sample, the required dot, line and plane patterns can be separated out on the surface of the machined sample. Said invention provides new basis for preparing very large scale integrated circuit.




Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)


Cited By (0)

    Publication numberPublication dateAssigneeTitle