Electrochemical fine machining method based on ionic conductance and its device

基于离子电导的电化学微细加工方法及装置

Abstract

本发明公开了一种基于离子电导的电化学微细加工方法及装置。它是采用金属电极置于充满电解液的毛细管中所组成的加工电极作为阳极,被加工样品置于充满电解液的电解槽中,作为阴级,加工电极横向扫描被加工样品表面时,基于加工电极与被加工样品之间的离子电导变化,利用反馈系统控制两者的间距,当加工电极与被加工样品之间施加直流电压时,在被加工样品表面析出所需的点、线、面图案。本发明原理先进,加工集成度高,为超大规模集成电路的制作提供了新的基础。
The present invention discloses an ionic conductance based electrochemical microfine machining method and its equipment. It is characterized by that said invention uses an electrolytic cell in which a machining electrode formed from the metal electrode placed in capillary tube filled up with electrolyte is used as anode and a sample to be machined is used as cathode, and when the machining electrode is used to transversely scan the surface of machined sample, on basis of change of ionic conductance between machining electrode and machined sample a feedback system is used to control the space between them, and when a d.c. voltage is applied between the machining electrode and machined sample, the required dot, line and plane patterns can be separated out on the surface of the machined sample. Said invention provides new basis for preparing very large scale integrated circuit.

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